讲座题目：集成电路晶圆缺陷检测技术现状与新原理探索

主 讲 人：朱金龙 教授

讲座时间：2023年10月17日（周二）14:00

讲座地点：龙湖校区8号实验楼301会议室

讲座内容：

The detection of nanoscale objects from massive background nanostructures is critical to many fields, including plasmonic biosensing, grating quality control, nanofabrication, and photonic crystals. Among all the applications, patterned wafer inspection has aroused widespread attention nowadays due to its tight connection with integral circuit industry. However, as Moore’s law continues, conventional optical inspection techniques is less and less sensitive to nanoscale features, and thus industry has to use electron-imaging techniques such as scanning electron microscopy, by sacrificing the throughput. In this paper, we propose an intrinsically fast, highly sensitive, and cost-worthy optical technique that is capable of detecting nanoscale objects/defects on a 9 nm node intentional defect array (IDA) wafer. Different to conventional optical inspection methods, our technique detects the perturbation of wavefront induced by the defects by introducing the noninterference phase reconstruction, thus an elegant self-comparison scheme can replace the conventional die-to-die comparison, to improve the signal-to-noise ratio by eliminating the impact from surface roughness. Experimental results showed that this technique can detect various defects on the IDA wafer and has a large field-of-view that is limited only by the size of a camera sensor. Rigorous electromagnetic modeling predicted that our method is capable of detecting even smaller defects.

主讲人简介：

朱金龙，华中科技大学机械学院教授/研究员，博士生导师。入选国家高层次人才、中国科学院“百人计划”、湖北省“百人计划”A类、武汉市“武汉 英才”产业领军岗、华为-华中大“东湖学者”、华中大“华中卓越学者”等人才计划。主要研究方向为集成电路芯片纳米尺度探测技术与装备。以第一作者、通讯作者在包括Nature Communications、Advanced Science、ACS Nano、Nano Letters、International Journal of Extreme Manufacturing、Nanoscale Advances、Advanced Photonics Research、Optics Letters等期刊和国际会议上发表论文60余篇。已申请美国、国内专利22项（其中已授权13项）。目前担任Nano Letters, Light: Science & Applications, Applied Physics Letters, Optics Letters, Optics Express等多个国际期刊审稿人。现为Frontiers in Physics编委（2022-）、《光学学报》青年编委（2022-）、机械工程学会极端制造分会委员会委员（2022-）、中国光学学会光学测试专业委员会委员（2022-）、中国光学学会光电技术专业委员会委员（2022-）、中国空间科学学会空间智能专委会青年委员（2023-）、国家科技部“高层次人才”通讯评审专家、美国自然科学基金会NSF海外通讯评审专家（2020-）、瑞士自然科学基金会SNSF海外通讯评审专家（2020-）。

科技处 机电学院

2023年10月13日